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Thermal oxide Silicon wafer

Standard Specifications
Product Name	Thermal oxide Silicon wafer (SiO2/Si) Oxide layer on Silicon wafer Thermal oxidation of Silicon wafer

Oxide-layer(SiO2 layer)	25nm, 50nm, 100nm, 285nm, 300nm, 500nm, 1um, 2μm, 5μm or others
Oxidation surface	Single sided oxidation, Double sided oxidation
Oxidation process	Dry-oxidation, Wet-oxidation,

Conductivity type/Dopant	N-type/Phos-doped or N-type/As-doped or P-type/Boron-doped or Un-doped
Orientation	<100> or <111>
Diameter of Silicon wafer	2"(50.8mm), 3"(76.2mm), 4"(100mm), 6"(150mm), 8"(200mm), 12"(250mm)
Thickness of Silicon wafer	280um, 380um, 525um, 675um, 725um
Resistivity (Ohm-cm)	0.001~0.005, 0.01~0.09, 0.1~0.9, 1~10, 1~100, >1000, >10000, >20000
Polishing	Single side polished or Double side polished
Surface Roughness	Ra<5A (0.5nm)

Standard Specifications
Product Name	Orientation	Standard Size	Oxide-layer	Polishing
Thermal oxide Silicon wafer (Un-doped or P-type or N-type)	<100> ±0.5° <110> ±0.5° <111> ±0.5° Or others	φ2" x 0.28mm φ3" x 0.38mm φ4" x 0.5mm φ6" x 0.625mm φ8" x 0.725mm φ12" x 0.775mm Or others	25nm 50nm 100nm 200nm 285nm 300nm 500nm 1μm 2μm 5μm Or others	SSP or DSP Oxide-layer on One side or Both side	Send Inquiry

The Thermal oxide Silicon wafer is growth an oxide-layer(SiO2) on Silicon wafer, also name as "SiO2 + Si wafer". Growth a good quality oxide-layer on the surface of Silicon wafer is important to the entire semiconductor integrated circuit fabrication process.

The Thermal oxide SiO2-layer is not only as a masking layer for ion implantation or thermal diffusion, and also a passivation layer that protects the surface of the device from the surrounding environment. It's not just an electrically isolated insulation between the device and another device. It is also a major component of MOS processes and electrical isolation in multilayer metallization systems.

We can offer Thermal oxide Silicon wafer in 2~8 inch size, and with oxide-layer thickness from 25nm ot over 5μm. We can also pre-dice wafer to small size like 10x10mm or 5x5mm or 20x20mm or 25x25mm or others.

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Thermal oxide Silicon wafer

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