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Fused Silica glass substrate/plate

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Fused Silica Quartz (SiO2) glass substrate
Material	Fused Silica Quartz (SiO2) glass
Other Names	Fused Quartz substrate, Quartz glass plate, Fused Silica substrate, Fused Silica plate
Grade / Application band	JGS1 (VUV grade), Can be used in 180~2500nm wave band JGS2 (UV grade), Can be used in 220~2500nm wave band (Commonly used) JGS3 (IR grade), Can be used in 700~3500 wave band
Refractive index	1.47012 at 4um
Specific heat	703 J/kg. ℃
Thermal conductivity	1.38 W/m. ℃
Thermal expansion coefficient	0.55 x 10E-6 /℃ at 300K
Moh's hardness	5.5 ~ 6.5
Compressive strength	1100 Mpa
Young's modulus	73.1 Gpa
Shear modulus of elasticity	31.2 Gpa
Apparent elastic limit	55 MPa(7980 psi)
Application	Quartz glass is extremely excellent in heat resistance, light transmittance, electrical insulation, and chemical stability. Can be used to make electric light source, semi-conductive device, optical instrument, etc.

Material	Standard Size	Surface quality
Fused Silica glass substrate	φ25.4mm x 0.5mm φ50.8mm x 0.5mm φ100mm x 0.5mm 10 x 10 x 1.0mm 10 x 10 x 0.5mm 20 x 20 x 0.5mm 50 x 50 x 0.5mm 100 x 100 x 0.5mm 100 x 100 x 2.0mm Or others	Polishing: - Double side optical-polished (Roughness: Ra 5~10nm) - Double side CMP-polished (Roughness: Ra<0.5nm) Size Tolerance: +/-0.1mm Thickness Tolerance: +/-0.1mm or +/-0.05mm Others: Upon requirements Parallelism: 3 minutes, 1 minute, 30 seconds, 5 seconds or higher Surface Finish: 60-40, 40-20, 20-10 (scratch-dig) Surface Figure: 1/2λ, 1/4λ or higher Chamfer: 0.25mm × 45°

Fused Silica glass is excellent and widely used in new lighting sources, also used in the manufacture of modern light sources such as xenon lamps, pulse lamps, atomic spectrum lamps;

Fused Silica Quartz glass substrate is composed of pure SiO2 and is an indispensable high-purity material for the electronics industry. As a crucible for the production of silicon single crystals, diffusion tubes and instrumentation for the manufacture of integrated circuits are made of quartz glass; Fused Silica Quartz glass has a very low spectral loss and is the leading material for the manufacture of optical fibers; Quartz glass plate/substrate has a wide transmission range from ultraviolet to infrared, and is resistant to rapid cooling and rapid heat. It is an irreplaceable optical material for aerospace.

The JGS1 is VUV grade of Fused Silica and has high transmittance(>90%) in 180~2500nm wave band. The JGS2 is UV grade of Fused Silica has high transmittance(>90%) in 220~2500nm wave band. And the JGS3 is IR grade of Fused Silica has high transmittance(>90%) in 700~3500nm wave band.

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