DyScO3 substrate

The main performance parameters

Substrate:

DyScO3 substrate

Growth method:

Czochralski method

Crystal Structure :

Orthonormal system

Lattice constant:

Melting point:

2127 ℃

Density:

6.9 g/cm³

Orientation:

<100>, <001>, <110> ±0.5º 

Standard Size:

10x10x0.5mm, 10x5x0.5mm, 5x5x0.5mm

Polishing:

Single side polished or Double side polished

Roughness:

Ra < 5A(0.5nm) at 5x5μm

Packing:

class-100 clean bag, in class-100 clean room,