InAs substrate
The main performance parameters |
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Dopant
|
Conductivity type
|
Carrier Concentration
(cm-3) |
Mobility
(cm2/V.s) |
Dislocation density
(cm-2) |
Standard Size
|
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InAs
|
Un-doped |
N-type
|
5 x 1016
|
2 x 104
|
<5x104
|
Φ2″x0.5mm
Φ3″x0.6mm
Φ4″x0.8mm |
|
InAs
|
Sn-doped
|
N-type
|
(5-20) x 1017
|
>2000
|
<5x104
|
Φ2″x0.5mm
Φ3″x0.6mm
Φ4″x0.8mm |
|
InAs
|
Zn-doped
|
P-type
|
(1-20) x 1017
|
100-300
|
<5x104
|
Φ2″x0.5mm
Φ3″x0.6mm
Φ4″x0.8mm |
|
InAs
|
S-doped
|
N-type
|
(1-10) x 1017
|
>2000
|
<5x104
|
Φ2″x0.5mm
Φ3″x0.6mm
Φ4″x0.8mm |
|
Orientation |
<100> / <111> ±0.5° Or other off-angle |
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Standard Dimension
|
φ50.8x0.5mm, 10x10x0.5mm, 10x5x0.5mm
|
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Surface roughness
|
(Ra):<=5A (0.5nm)
|
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Polishing
|
Single side polished or Double side polished
|
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TTV / Bow / Warp |
2" wafer (TTV: <10 um, Bow: <10 um, Warp: <15 um) 3" wafer (TTV: <10 um, Bow: <10 um, Warp: <15 um) 4" wafer (TTV: <15 um, Bow: <15 um, Warp: <15 um) |
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Special specification | We can customize specific specification according to customer's requirements |
Indium arsenide, InAs substrate. InAs single crystal as a substrate can be use to grown InAsSb / In-AsPSb, InNAsSb and other heterojunction materials, Produced wavelength 2 ~ 14μm infrared light-emitting devices, InAs single crystal substrate can also be use to epitaxial growth a superlattice structure material AlGaSb, Produce mid-infrared quantum cascade laser.
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